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    PCIE????????????/ǧ??????????????

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    PZTϵ???Ƭʽѹ???մ?΢??????λ???????о?

    ???????ڣ?2019-12-20 14:10?????? ???????????

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    ????ѹ???մ?΢??????????????ѹ??ЧӦ?????????͵Ĺ?ִ̬?????????ھ??ܹ?ѧ??΢?ͻ?е??΢???Ӽ??????????Ӧ?õȸ??¼????????ù㷺Ӧ??. ??ЩӦ??Ҫ??
    ѹ???մ??????????С????????ѹ?͡?λ???????ܼ??ɻ??ķ???չ??????????ճ?????ѹ???մɵ?Ƭճ????ɵĶ??ѹ???մ?΢??????, ?????ܵ?Ƭ?մ?ĤƬ??ȵ?????(????200μm???º?ȵ??մɵ?Ƭ?????൱???Ѷ?)???޷?ʹ????С?ͻ??????ɻ??????????е?ճ???ʹ?????ڵ糡?????²????????䣬??????λ?Ƶľ??ܿ??ƣ??ر????????ڳ?ʱ??ߵ糡??????, ?򷴸?ʹ?ú?ճ????????մ?Ƭ???䣬??????????ܶ񻯣?????????????????????????????????ʹ??????????Ӧ?ô????ܴ?IJ???. ??????,?????մ??????????Ʊ??????Լ??????մ???Ĥ???ڵ缫һ?ι??ռ???, ?õ??Ķ??Ƭʽѹ???մ?΢??????(MMPA)??һ???ʺϹ?ģ?????ġ??????????????͹????մ?????. ???ֶ??Ƭʽ???????ڲ????????Ʊ????գ?????Ĥ?????Ƶ?100μm???µ?Ĥ???ҹ??պ??մɲ?֮??ͨ?????ڵ缫ֱ?ӽ?϶???????ճ???ճ?ϣ??????????С?ͻ???΢?ͻ????????????????Ҳ?õ??ܴ?ĸ??ƣ??մɲ??ķֲ?????õ???Ч?ؿ˷??????????????????ʹ??????. ???ı????????????մ????ӳ??ͼ??????մ???Ĥ/?????ڵ缫???ռ??????????ɵĶ??Ƭʽ???ߺ?ǦPZTϵѹ???մ?΢??????, ???ڹ????????״?. ??????Ҫ?ǶԸ??????ľ?̬?Ͷ?̬λ?????Խ????о?.
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           2.1?????Ƭʽѹ???մ?΢?????????Ʊ?
    ?????Ʊ????Ƭʽѹ???մ?΢????????????????ͼ1??ʾ???辭??10????Ҫ?Ĺ??ղ??裺?????õ????մ??Ʊ??????Ƶ?ѹ??Ӧ??ϵ?????????PZT??Ԫϵѹ???մɷ???, ?????ʽΪxPb(Zn1/3Nb2/3)O3+yPbZrO3+zPbTiO3,(PZN-PZ-PT), (x+y+z=1), Ȼ???մɷ??????л???????һ???Ĺ?/Һ??????Ͼ??Ⱥ?,?õ????ȵ??մɽ???, ?ٽ????մɽ??Ϸ??????ӻ??ϵ??϶??????????, ͨ???????????߶??Լ??л??ش??ٶ????Ʊ?????һ????ȵġ????ȡ??????ܵ???????Ĥ. ????????Ĥ??Ƭ??һ????״???մ???Ĥ, Ȼ??????Ĥ??һ??ӡˢ?Ͼ???һ??ͼ???ĵ缫????,?ٽ?ӡ?е缫???մ???Ĥ??һ???????д??????һ???Ƶ?ģ?????Ƭ???ͣ??õ?һ???????ڵ缫?ġ????Ƭ״ʽ?մ?????. ?????մ????尴?????????????С?и?ɶ??????մ????????????һ????봿Al2O3?????л?????????, ?ٽ??и????ܷ??ս?(?ս??¶?Ϊ12601300 C), ???þ????ڵ缫?Ķ??Ƭʽ?մ?????. ???ö??Ƭʽ?????????˰?ͼ2??ʾ?Ľṹ????Ag??缫, 650 C?????????¼???(????ʱ??30min???糡4000V/mm, ?¶?140 C). ???????????????Ӻ?Ĥ?͸????ڵ缫???յĹ????????????ջ?????????Ϊ5mm×6mm, ?ܺ??Ϊ2mm(ѹ???մɲ㍊Ϊ35?㣬ÿ??47μm?????±?????Լ120μm??) ?Ķ??Ƭʽѹ???մ?΢??????.
     
           ͼ2?????Ƭʽѹ???մ?΢???????ڵ缫????缫???ӵĽṹ??ʽ
           2.2????Ʒ????
    ?????մɵ?Ƭ??ѹ??Ӧ??d33ϵ?????й???ѧԺ??ѧ?????Ƶ?Berlincourt?Dz???,?????????΢????΢?ṹ???й???ѧԺ????????????KYKY??1000B??ɨ???????΢??(SEM)?۲?. ???Ƭʽѹ???մ?΢????????λ??ֵ??????ԭ???dz???????DGS??6?????Ե?в????Dz???, ?ֱ???Ϊ0.01μm, ??̬λ???Ǹ???DoppelЧӦԭ???õ??????????в???,????ϵͳ??ͼ3??ʾ???ֱ???Ϊ0.005μm.
     
    3???????????
    ?????????ܺ㶨???Ӧ????ѹ???մɵ?Ƭ?????ڴ?ֱ?????ȷ???(????????)?Ķ????????һ??ѹ, ??ֻ????ѹ???α?Ϊ?????α?ʱ????ѹ?緽?̿?֪??ѹ???մɵ?Ƭ???????ȷ????????λ??Δll??ʾΪ
                                              
    ʽ?У?d33Ϊѹ??Ӧ??ϵ????VΪ???ӵĵ?ѹ??tΪ?մɵ?Ƭ?ĺ??. ʽ(1)????, ?????ӵ?ѹΪ?仯??ʱ??ѹ??Ƭ?ں?ȷ????λ????ѹ??Ӧ??ϵ??d33?????ӵĵ?ѹV?????ȣ????????޹أ????ǣ????????ӵ糡Ϊ?仯??ʱ??????????????λ?Ʋ?????ѹ??ϵ??d33?͵糡?????ȣ????????ȳ?????. ?ɼ???ѹ???մ??ں?ȷ???????????λ????ѹ???մ???ѡλ???????Ĺ?????ʽ?й?. Ӧ??ʱӦͬʱ???????ӵ?ѹ?͵糡???????أ?????????ѹ???մ??ڸߵ糡?????ڽӽ??????糡??Ӧ?ã?ͬʱ??????ѹ?????ܵͣ???λ????Ҫ??????.
    ?????????????????ӵ?ѹһ??ʱ???????մ?Ƭ?ĺ?Ⱦ??ܴﵽ??С??????ȷ???ߴ??Ŀ??. ??ˣ???????մ?Ƭ????ͼ2?Ľṹ??ʽ???л?е????????ѧ??????Ȼ???մɲ?һ?𼫻????????մ?Ƭ?ļ????????ȡ????Ľṹ??ʽ. ???????????ѹ???մ?΢????????ӹ?????ѹʱ????????λ?Ƶõ??˵??ӣ??ɱ?ʾΪ??
                              
    ʽ??NΪ?մɵ???????Ҳ?????ѹ???մ?΢????????λ?????뵥Ƭѹ???մ???ȷŴ???N??. ???ǣ???λ??????ÿƬѹ???մ?Ƭ???ӵĵ糡Ϊ?仯??ʱ??ʽ(2)?ɱ?ʾΪ
                             
    ʽ??tΪÿ??ѹ???մ?Ƭ?ĺ?ȣ?lΪ??????????ܺ??. ?Ƚ?ʽ(3)??ʽ(1)?ı???ʽ?????Է??ֵ???????????ܺ??l?뵥Ƭ?մɵĺ??t??ͬʱ????ʽ??ͬ??????????????????ÿƬѹ???մ?Ƭ???ӵĵ糡ǿ???뵥Ƭѹ???մ?һ??ʱ?????ߵ?λ??????ȣ????ǣ???????????ӵĵ?ѹ?ȵ?Ƭѹ???մɵĵ?ѹ??????N??.
    ?????????Ϸ????ɼ?????Ƭѹ???մ???Ȼ???ͨ??????Ĥ?????ﵽ΢????????λ?ƣ??????ӹ?????ѹ????ǧ??????????Ӧ?ã?????????????Թ?????ѹ???Ե糡??Ϊ?仯??ʱ???ֱ???зŴ?λ?????ͽ??͹?????ѹ???ֲ?ͬ?Ĺ??ܣ??ر??Ƕ???????ڱ??ֵ糡??????????, ??ͨ???????????IJ??????????ܺ?ȣ???ˣ?ʵ??Ӧ??ʱ????????????????зŴ?λ??????ͬʱ??????Ч?ؽ??͹?????ѹ.
    ????ͼ4???????մ???Ĥ???ӹ??պ??մ?/?????ڵ缫???ռ????Ʊ??ġ??ܺ??Ϊ2mm(ѹ???մɲ?Ϊ35?㣬ÿ??47μm?????±?????Լ120μm??) ?Ķ??Ƭʽѹ???մ?΢?????Ͻ???SEM??Ƭ??ͼ?а?ɫƽ??????Ϊ?????ڵ缫???ڵ缫֮??Ϊ?մɲ?. ?մɲ??пɹ۲쵽?????СΪ??΢?׵????ף??????????մ???????Ĥ??ճ????????ܼ????л???ռ??һ???ı????????մ?/?ڵ缫????ʱ????ЩĤ???л???Ļӷ???????մɲ??г?????????????. ???ǣ????1??ʾ????Щ??????PZTϵ???Ӵ?Ƭ?в?δ????Ӱ???մɲ?Ļ???????. ??һ????????ӷ??Ʊ?PBNNӲ??ѹ???մɵĻ???ϵ??????һ??
           ???,??????Ϊ?????ӷ??õ??մɵĻ?????????ø?ѹ???մ?Ƭ?Ļ?????ͬ.
         ͼ4??PZTϵ???Ƭʽѹ???մ?΢λ??????ָ?ṹ??ʽ?ĶϽ???SEM??Ƭ
     
     
     
             ?? 1 ???ӷ??͸?ѹ???õ???PZN-PZ-PT?մ?Ĥ???ܶȡ????ϵ????ѹ??ϵ???ıȽ?
          ͼ5???Ʊ??õ???PZN??PZ??PT???Ƭʽѹ???մ?΢??????????λ??ģʽ??̬?ĵ?ѹ??λ??????????. ?Ӹ????߿??Կ??????????ӵ?ѹ???????ٻص???ʱ????????ʼ??ʽ(1)??ʾ?????Ժ?׼???Է?ʽ????λ?ƣ?Ȼ???Է????Է?ʽλ?ƣ?????ѹ??????ѹ??ʼ??Сʱ????λ?Ʋ??ٰ?ԭλ?ƵĴ?С???أ????dz???һ??λ???ͺ?. ???ֵ?ѹ??λ?Ƽ???ͺ??ϵ??PZTϵ????ѹ???մ?λ??????һ????Ҫ????. ???????ֵ?ѹ??λ???ͺ??ԭ????PZTϵѹ???մɵľ???ṹ?͵??ṹ?й?. ??ΪPZTϵѹ???մɵľ???ṹΪ???ѿ?ṹ??????a??c??ľ????????ȣ???ѹ???մɼ???????????еľ????Դ?????????90 ???. ?ڵ͵糡????????(??Ӧ?ص?ѹҲ?ϵ?)??ѹ???մɵ?λ????Ҫ?????ڵ?ż?????ڵ糡?????·??????????????伫??ǿ?ȵı仯?????????ЧӦ??ź?ϣ?????˵??ѹ??ЧӦ???????????????ԵĻ?еλ?ƣ????ǣ???ѹ???մ??ڸߵ糡?????£????ھ????е?90 ??뿪ʼת?????????????????ȵ?a??c?ụ????????ѹ???մ???ƽ?л?ֱ?ڵ糡????ĵ?λ???????ʷ?????????. ????ѹ?????ֵ??ʼ??Сʱ??????90 ??????д??ڿ???Ͳ???????ֵ?룬??Щ????????Ĵ??ھ?ʹ??ѹ???մɳ??ֵ?ѹ??λ?Ƶ??ͺ????????
     
        Ƭʽѹ???մ?΢????????ÿƬѹ???մɲ??ѹ??????????Ϊֱ?۵?????. ?????Ƭʽѹ???մ?΢??????????2.3V??ѹ(?糡Ϊ50V/mm???ӽ????ת?????ֵ?糡??5??)??????????Լ0.04μm????λ??????????Ϊ???ת???ѹ??Ӧ???????С??Ӱ??ʱ????ʽ(2)?ɼ???õ?ƽ??ÿƬѹ???մɲ??ѹ??Ӧ??ϵ??d33≈500pC/N.??һ??ֵ???1???е?d33??ֵ?????ӽ?. ??ˣ???????Ϊ, ?????????Ƶ?ѹ???????е?Ƭѹ?????ܴﵽ?˵?Ƭ?????մ?Ĥ?Ϳ????մ?Ƭ??ˮƽ.
    ????ͼ5?Ľ??????ʾ?˶??Ƭʽѹ???մ?΢??????????Ե͵Ĺ?????ѹ38V?????£??????ɲ?????1μm???Ҵ??λ?ƣ??????????ߴ?ȴ??С. ??ˣ???һ??????Ӧ????һЩ??????ѹ?͡?λ???????????ߴ?С?ĸ??¼?????????????Ӳ????????Ҫ???????ߴ?С, ??????ѹ<12V.
    ????ʵ??ʹ??PZTϵ????ѹ???մ?ʱ?????ڼ?????ѹ???մɼ????????෴?ķ????ѹ??糡ʱ????????ѹ???մɵ??˼?????????ѹ?????ܣ???Сλ????????ˣ????Ƭʽ????ͨ???Ǽӵ???????ѹ????. ͼ6?Ƕ??Ƭʽ???????ϵ??????ҽ?????ѹ???κ????Ķ?̬λ????ӦƵ??. ??ͼ6(b)??ʾ??λ????Ӧ???߿??Կ????????Ƭʽ?????ڷ壭??ֵ12V??Ƶ??1kHz?ĵ??????ҽ??????????£???????λ????Ϊ0.28μm, ????ֵ??ֱ????Ϊ12Vʱ?ľ?̬λ????????һ?£?˵????250V/mm?糡?£???λ??????Ƶ???????Ե???????ϵ?????⣬?????Ķ?̬λ?ƻ????????Ҳ???ʽ???????ѹ?????λ?????С(ͼ?к??Ѽ?????λ??)???????????????λ???ܸ???糡?仯??????λ??. ??ʵ?ϣ????϶?̬λ?ƍ???????100Hz??5kHz????Ƶ?ʷ?Χ?ڻ??????ֲ??䣬??ɴ?ͼ7??ʾ?Ķ??Ƭʽ????λ?ƺ???λ??Ƶ?????߿??Կ?????ͼ?У?????????ͬ?ĵ?ѹ????V=6(1+sinωt) ????ͬ?ĵ?ѹƵ???????²????Ķ?̬λ?Ƽ???????Ƶ?ʶ??䣬??????λ????5kHz????????????仯.
     
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    ????1. ???ӷ??ƵõĶ??ƬʽPZTϵѹ??΢????????ѹ?????????ѹ???õ???ѹ???մ????ܻ???һ??.
    ????2. ???Ƭʽ?????ĵ?ѹ-λ????????PZTѹ???մɲ??ϵľ???ṹ?͵???ڵ糡?????µ???Ϊ?йأ??ڵ?Ƶ?糡?????µ?????ܺܺõ?ת??ʹ??100Hz5kHzƵ?ʷ?Χ?ڶ?̬λ?ƴ?С???????ֲ???.
    ????3. ??????ѹ??ЧӦ?о?ѹ???մ??ڵ糡?????µ?ż???Ӻ͵?????????λ?????仯???????о?ѹ????΢?????ܵ?һ???ܺõķ????????ܻ????Ƶ?ʱ仯??ѹ??ϵ??.
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